FET with interdigital structure - has semiconductor substrate on which elements of two electrodes are interdigitated

摘要

The FET has electrodes on a plane surface, at least partly in the surface plane. Electrodes are divided in a series of secondary electrodes, inserted between secondary electrodes belonging to the other electrode. It has a semiconductor substrate with very high resistivity, and at least one series of secondary electrodes interconnected by conducting traces occupying a part of the substrate.