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Zinc-diffused narrow stripe AlGaAs/GaAs double heterostructure laser

机译:锌扩散窄条AlGaAs / GaAs双异质结构激光器

摘要

A zinc-diffused narrow stripe AlGaAs/GaAs double heterostructure laser device and a method of making the same. A double heterostructure layered structure including a p-type GaAs active layer sandwiched between two n- type AlGaAs confinement layers is formed on a substrate. A p-type zinc diffused stripe region having a U-shaped diffusion front extends longitudinally between two reflective surfaces located on respective ends of the device and extends vertically from the surface of the upper confinement layer down to at least the surface of intersection between the active layer and the lower confinement layer. In a method of forming the device, the various layers are formed by epitaxial growth or by metalorganic chemical vapor deposition. The stripe region is formed by diffusing zinc from a source through a slot in a diffusion mask. The zinc diffused into the device is driven in by heating the device in the absence of the zinc source.
机译:锌扩散窄带AlGaAs / GaAs双异质结构激光器件及其制造方法。在基板上形成包括夹在两个n型AlGaAs限制层之间的p型GaAs活性层的双异质结构层状结构。具有U形扩散前端的p型锌扩散条区域在位于该装置的各个端部的两个反射表面之间纵向延伸,并且从上侧限制层的表面垂直向下延伸至至少与活性物之间的相交表面。层和下限层。在形成器件的方法中,通过外延生长或通过金属有机化学气相沉积来形成各个层。通过通过扩散掩模中的缝隙从源扩散锌来形成条纹区域。在没有锌源的情况下,通过加热设备来驱散扩散到设备中的锌。

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