bridge to the absolute measurement of the capacitor or capacitance and of the conductance of semiconductor samples

摘要

The bridge is characterized by the fact that, in addition to the test pre-voltage, and HF signal is applied to the test-piece (1), that in each testing branch and balancing branch of the bridge two controllable damping elements (61 to 64) are installed whose input connections are linked with the output connection of an oscillator (4), and whose output signals are added with a phase shift of 90o and applied to the test-piece or to a unit in the balancing branch for capacity and conductance balancing and that the unit for the capacity and conductance balancing has a phase shifter (8) with two output connections, on one of which the input signal is present without a charge in the phase position and on the other output connection the input signal is present, with a shift of 90o, and that both output connections are connected by damping elements (91 to 94) to an evaluation unit.