REMOVAL OF MAGNETIC ANISOTROPY OF AMORPHOUS THIN FILM

摘要

PURPOSE:To obtain a magnetic material having a good permeability and to enable the removal of magnetic anisotropy without opening the vacuum bath, by a method wherein in generating an insulating film on an amorphous thin film of the metal-metal system by a sputter method, a rotating magnetic field is applied on the amorphous thin film. CONSTITUTION:When an insulating film is generated by sputter method on a metal-metal system amorphous thin film A generated by a sputter method, a rotating magnetic field H is applied on the amorphous thin film A. Then a board 4 to which a target is attached is rotated to place Al2O3 (target 7) in a position opposed to a substrate G, a rotating base 1 is rotated and simultaneously therewith a magnetron source 3 is operated, thereby applying a magnetic field in parallel with the planes of the substrate G mounted on the rotating base 1 and of the amorphous thin film A. And when a shutter 8 is opened, due to the rotation of the applied energy and the rotating base 1, an insulating film B is produced while the induced magnetic anisotropy is removed. With this, the magnetic anisotropy of the amorphous thin film A can be removed simultaneously with the production of the insulating film B, and in addition without necessitating the temperature rise of the amorphous thin film A.