SUCTION TABLE FOR GREEN SHEET INSPECTION DEVICE

摘要

PURPOSE:To eliminate lowering of a suction capacity otherwise caused by clogging in grinding along with a reduction in manufacture cost, by making a porous material composing an adsorption body of a suction table based on a porous alumina ceramics. CONSTITUTION:A frame 6 is fixed on a metal plate 5 surrounding an area to match a green sheet to be inspected, filled with a raw material 7 made in a clay by mixing highly pure alumina ceramic particles with a proper assistant and sintered to be solidified. Then, the surface of a product thus obtained is ground to make a suction body 8 having a surface with a necessary flatness. The suction body 8 thus obtained is fixed on a support plate 9 together with the frame 6 to make the surface thereof as a suction surface. A lattice-shaped support beam 9a is provided on the top of the support plate and the top surface thereof is bonded on the adsorption body for reinforcement.