OBSERVING APPARATUS OF POLE FIGURE OF X-RAY DIFFRACTION OF THIN-FILM SAMPLE

摘要

PURPOSE:To obtain a complete pole figure by only one setting of a sample and thereby to enable the execution of highly precise observation, by a method wherein slender parallel X-rays are made to fall at a small angle on one point on a thin-film sample and the sample is rotated in a reciprocating manner within a range of 90 degrees around the X-rays as an axis. CONSTITUTION:X-rays emitted from an X-ray source 1 and made parallel through a collimator 2 are made to fall on a sample 3. The sample 3 is attached on a base plate 4 and rotated at an angle of 360 degrees (an arrow beta) by a shaft 5 fitted at a right angle to the base plate. The base plate 4 rotates in a reciprocating manner in the direction of an arrow alpha around the axis (p) of the X-rays within a range of 90 degrees, while it is inclined at an angle of about 0.5-5 degrees gamma to the axis (p). On the lateral side of the axis (p), a stage 9 whereon an X-ray detector 6 and a spectral crystal 7 and a solar slit 8 both disposed in front of the detector are mounted is provided and it is rotated (an arrow delta) at a slow speed around a straight line (q), as an axis, which passes through a point of intersection of the sample 3 and the axis (p) and is perpendicular to the surface of paper. The stage 9 is inclined at an angle of about 2gamma degrees to the fitting plane of the collimator 2 and the plane of rotation. By this apparatus, the relationship between a diffraction angle 2theta determined by the rotations alphaand beta and the rotation of the stage 9, and the intensity of diffracted X-rays, can be observed.