Integrated process for the electrochemical modification of a chemical sensor and an array of chemical sensors

摘要

A selectivity of chemical sensors can be achieved by the electrochemical modification of the sensitive region of the sensor (e.g. in the gate region). For the modification process of the sensor, there is generally required a pretreatment step followed by further deposition and cleaning steps. According to the conventional processes, sensors are modified in separate process steps which are very time consuming. By means of the invention, this can be automated for the individual sensor or for the array of a plurality of sensors in such a way that the modification can proceed in stages according to a prescribed modification plan without interruption. For this purpose, the solutions required for the various process steps are, by means of a computer-controlled flow system, passed through an electrochemical flow cell and the control therefor is combined with an automatic setting of the electrochemical parameters required in each case. In addition, it is possible to enter the production process into a data processing facility and to recall information as required in such a way that a desired modification process can proceed fully automatically.