DEVICE FOR CONVEYING ARTICLE FROM AT LEAST ONE SUPPORTER TO AT LEAST ANOTHER SUPPORTER

摘要

PURPOSE: To simultaneously support plural wafers by continuously changing an interval between gripping means by gears and racks in plural wafer gripping means, and transferring the wafers between two supports having notch means of a different interval. CONSTITUTION: An interval P between vertically held wafers W is required to be changed for being held by notch means of both supports P, N by being transferred since the notch means are different between one support P and the other support N. Independent carriages 5 to support respective grippers 1 of the wafers W can be translated on a plate 6, and respective carriages 6 are connected to bars acting as racks 9a. These racks 9a are formed so as to cooperate with a gear group 10 having different diameters, and an interval (an interval P of W) between grippers 1 is changed while translating by rotation of the gear group 10. Therefore, gears are rotated according to a movement between the supports P, N of the plate 6 to be adjusted to a notch of both supports P, N.