Production process for large-area thin film electronic matrices on glass for liquid crystal flat screen displays by means of partial white gradual vacuum vapour evaporation by small perforated metal foil masks

摘要

Active matrix addressed liquid crystal TV sets configurated in the way described by A.G. Fischer in US-Pat. 3,840,695 can be enlarged to monolithic square-meter-sized wall TV panels. The large-area thin-film-electronic matrix circuit needed to address the superimposed liquid crystal layer can be vacuum-deposited from a multiple source evaporator onto one coherent glass pane through a number of exchanged small reticulated perforated sheet metal masks which are held successively against a chosen reticle of the large glass pane, in exact registration with each other and neighbouring reticles. The large glass pane must be precision-shifted in X-Y-reticle-steps for repeated vacuum depositions, in exact registration. The novel machinery required is described.