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Non-contacting inductively coupled displacement sensor system for detecting levels of conductive, non-magnetic liquids, and method of detecting levels of such liquids

机译:用于检测导电的非磁性液体的液位的非接触式感应耦合位移传感器系统以及检测这种液体的液位的方法

摘要

An inductance coil serves as a displacement sensor arranged in connection with a tuned circuit of an oscillator. Liquid level displacement in an LEC crystal growth environment is sensed as a frequency change in the oscillator circuit as compared to a set point value. The sensor is protected from the environment by an outer protective sheath of non-conductive, non-contaminating material such as boron nitride.
机译:电感线圈用作被布置为与振荡器的调谐电路连接的位移传感器。与设定点值相比,LEC晶体生长环境中的液位位移被感知为振荡器电路中的频率变化。传感器采用非导电,无污染的材料(例如氮化硼)的外部保护套来保护环境。

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