COMPOSITION ANALYSIS METHOD BY MICROPROBE AUGER ELECTRON SPECTROCHEMICAL ANALYSIS

摘要

PURPOSE:To shorten the time required for analysis by measuring several points at the same time when the composition of a sample is performed by microprobe Auger electron spectrochemical analysis, and specifying the point where the measured results agree as the composition of the entire body. CONSTITUTION:A target is measured by shifting the focus because there are a WSi2 part 1 and an Si part 2 and there is the step difference between the parts 1 and 2. At first, four measurement points (a) - (d) are selected on the target. The composition is analyzed at the just focus by microprobe Auger electron spectrochemical analysis. Then, the rate of W is largely dispersed. Then, the same measurement points are used, the focus is shifted and the measurement is performed. The larger the shift of the focus, the smaller the dispersion of the value of the composition. Then, the point where the focus change is minimum and the composition values agree is made to be the composition of the entire sample. Thus, the composition of the entire body can be readily detected, and the analyzing time is shortened.