Scattered light measuring arrangement for surface roughness investigation - using angular resolution of scattered light received by several receiver arrays arranged on curved holder

摘要

The light scattered from the sample (12) is incident on an array of detectors on a curved, possibly semicircular, carrier (17). The detectors are positioned so that their geometrical arrangement corresponds to equidistant intervals in the spatial frequency range of the sample. USE - Measuring spatially dependent roughness of optically flat surfaces.