SOL-GEL PROCESS FOR THE DEPOSITION OF THIN FILMS BY ULTRASONIC SPRAYING.

摘要

This process comprises the following stages: preparation of a solution (5) containing at least one solvent and at least one precursor of the polymer soluble in the solvent, the total concentration of precursor being from 0.05 to 2 mol / l; high frequency ultrasonic spraying (12), in a sealed sealed reactor (18), of the solution above the substrate (24) causing the deposition of a sol of said precursor on the substrate, the latter being maintained at a temperature below the boiling point of the solvent, and drying (28) of the deposited soil to evaporate the solvent and thus form a solid layer of said polymer. In particular, the precursor is a monomer. Optionally, annealing of the polymeric deposit can be carried out in order to obtain an inorganic deposit.