ELECTRON-BEAM APPARATUS AND ELECTRON-BEAM REDUCTION AND TRANSFER APPARATUS

摘要

PURPOSE: To make the whole spherical aberration smaller than a spherical aberration caused in an electron lens. ;CONSTITUTION: The title apparatus is provided with the following: an electron gun which is composed of a cathode 1 having a concave shape with reference to an emitted electron beam, of an anode 4 having a convex shape with reference to the cathode 1 and provided with an electron-beam passage hole and of a focusing electrode 2 converging the electron beam emitted from the cathode 1; and an electromagnetic lens 6. The spherical aberration, of a convex lens, which is caused by the electromagnetic lens 6 is offset by the spherical aberration, of a concave lens, which is caused by the electron guns 1, 2, 4.;COPYRIGHT: (C)1993,JPO&Japio