MINUTE TRENCH WORKING MACHINE AND MINUTE TRENCH WORKING METHOD

摘要

PURPOSE: To embody a high aspect structure having optical depth at low cost. ;CONSTITUTION: High frequency electric power 31 is applied to workpieces 10 and a working electrode 21 with a cathode coupling, and a plasma region 60 is formed on the tip of the working electrode 21. The introduction of a reaction gas 50 into the plasma region 60 causes the activation of the reaction gas and the adsorption of an active gas to a workpiece 10 surface opposite to the tip of the working electrode 21, and the reaction of the active gas to the workpiece 10 results in the etching of the workpiece 10 surface. The working electrode 21 is delivered in the workpiece 10 direction with a feed mechanism according to etching to trench 11 the workpiece 10. The reaction product of the workpiece and the reaction gas produced by the etching reaction is stuck and deposited on a side wall of a trench 11 to become a protective film 12 to etching, embodying the high aspect structure.;COPYRIGHT: (C)1993,JPO&Japio