DEVICE FOR ENVIRONMENTAL TESTING OF ELECTRONIC ENGINEERING ITEMS IN INERT ATMOSPHERE

摘要

The invention relates to test equipment, in particular to devices for environmental tests unpackaged integrated circuits under exposure to high and low temperatures. The apparatus may be used for process control (control probe) Electrical parameters of bare LSI (large-scale integrated circuits). The purpose of the invention - reduction of an inert medium flow and to increase reliability of the test results. For this test a device manufacturing holders are designed as detachable chambers which allow for a disconnection moving and stationary parts such as for loading the test article before entry into telloizolporvanny body and for carrying out tests in the body environment. By means of spring-loaded valves, installed in the housing windows, the apparatus provides input and output chambers of the housing without disturbing the integrity of the internal environment of the housing. Holders cams have their own heating and cooling elements in the form of a TIC (termoelektropoluprovodnikovyh converters) and the thermal conducting plate, as well as sensors for specifying and controlling temperature connected to connectors for connecting electrical circuits. The apparatus allows high accuracy to be maintained, and temperature control (± 0,5 & amp; deg; C). The test results are highly reliable. Flow rate is determined by the inert medium filling the disposable housing. 1 n. F ly-3-yl. AND WITH th of VI with th