Optical coatings for transparent conductive metal oxide films used in mfr. of solar cells, LCD etc. - comprises doped indium- and/or tin-oxide(s) deposited on metal oxide layer by sputtering in a water vapour atmos.

摘要

Coating transparent, electrically conductive metal oxide films comprises depositing a thin modifying film, comprising doped indium oxide or tin oxide or mixts. thereof, on the metal oxide layer, using a vacuum reaction method with water as the reactant gas. The thickness of the coating film is less than 20% of that of the base film. USE/ADVANTAGE - Used in the mfr. of solar cells, liq. crystal displays, and semiconductor radiation emitters and detectors, where a low surface resistance is required, and also for heat-insulating and optical glass, where low infrared or optical reflection is required. The coating leads to a decrease in reflection over the entire spectral range of visible light and near-UV light, gives a surface resistance which is decreased or which at least is not increased, and increases the transparency to light.