Non-contact semiconductor wafer height measuring appts. for circuit testing system - has platform for carrying semiconductor wafer and platform driving system for driving platform in determined direction and distance measuring unit

摘要

The distance measuring unit (20) is fixed at a distance from the platform (3) in the determined direction. A light source transmits a light beam (L) directed on the semiconductor system . A sensor receives a light beam reflected from the semiconductor system. A drive unit is provided, which determines a distance to the semiconductor system , on the basis of an output signal of the sensor. A control unit (30), controls the platform driving system (10Z) in such away, that the platform is positioned in the determined direction, on the basis of an output signal of the distance measuring unit. USE/ADVANTAGE - Determining faults in semiconductor wafers. Height position of semiconductor system can be correctly measured, exactly adjusted without damage to semiconductor system.