METHOD FOR EFFICIENT VERTEX MOVEMENT AND COMPUTATION FOR THREE-DIMENSIONAL TOPOGRAPHY SIMULATION

摘要

PURPOSE: To produce a solid expression which matches with component parts of a process simulation environment well. CONSTITUTION: This method efficiently calculates apex movement in a three- dimensional topography simulator. This method is suitable for calculation of apex movement especially when an etching/deposition speed is dependent upon the angle of a surface normal to the perpendicular direction. An object is expressed with a set of object solids. Each object solid has a boundary model expression, and this expression includes apexes, edges, and faces. This method normally consists of steps as follows; first, second, and third planes approximating all planes adjacent to an apex point to be moved are identified, and a first observation vector is determined, and a series of forward virtual planes are created, and a second observation vector is identified, and the farthest intersection between one plane of the series of forward planes and the second observation vector is identified, and the apex point is moved to this identified intersection.