DEVICE AND METHOD FOR ANALYZING BOLTZMANN EQUATION OF ANALYZED OBJECT SYSTEM

摘要

PURPOSE: To provide an analyzing device capable of obtaining easily the distribution function of a Boltzmann equation. ;CONSTITUTION: An input part 21 for inputting various kinds of parameters such as an electric field value, the thickness of a system and temperature, etc., in respect of the system of the analyzed object like an electron and a gas molecule, etc., an element equation generating part 22 which receives the various kinds of the parameters inputted by the input part 21, and generates simultaneous equations in each element of a finite element method by the analytical Boltzmann equation, a total element equation generating part 23 which generates total element simultaneous equations by summing the simultaneous equations in each element generated by the element equation generating part 22 extending over all the elements, an equation solving part 24 which obtains the distribution function (f) by substituting (m+2)-pieces of (f) of a known number to (m+1)²-tuple linear simultaneous equations in respect of the equation generated by the total element equation generating part 23, and solving the linear simultaneous equations about (m²+m-1)-pieces of (f) of an unknown number, and an output part 25 which outputs an obtained result are provided.;COPYRIGHT: (C)1994,JPO&Japio