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Electrode configuration for channel confinement of plasma discharge in an electrode structure using an ionizable gaseous medium

机译:使用可电离的气态介质在电极结构中限制等离子体放电的通道结构

摘要

An improved electrode structure (42', 42") for an addressing structure using an ionizable gaseous medium has a plurality of plasma discharge channels (20') and a reference electrode (30', 30") and a row electrode (62') extending along each channel. The channels open into a plenum (118) for exhausting gases from the channels and introducing into the channels an ionizable gaseous medium at a predetermined pressure. The reference electrodes and the row electrodes enter from opposite ends of the channels, and the reference electrodes cross below the plenum. The row electrodes have an end (110) spaced from the ends (102) of the channels. The end of the row electrodes is separated from the end of the channels by a first distance (D) adequate to prevent undesirable plasma discharge while the electrode structure is operating. In a first embodiment (42') the reference electrodes have an end (112) spaced from a first perimeter seal (106). The ends of the reference electrodes are separated from the first perimeter seal by a second distance (E) adequate to prevent substantial erosion or other disassociation of the first perimeter seal resulting from plasma discharge in the channel. In a second embodiment (42") the ends (112') of the reference electrodes are embedded in the first perimeter seal (106').
机译:用于使用可电离的气态介质的寻址结构的改进的电极结构(42′,42″)具有多个等离子体放电通道(20′)和参考电极(30′,30″)以及行电极(62′)。沿每个通道延伸。通道通向增压室(118),用于从通道中排出气体,并以预定压力将可电离的气态介质引入通道中。参比电极和行电极从通道的相对端进入,参比电极在气室下方交叉。行电极具有与通道的端部(102)间隔开的端部(110)。行电极的端部与通道的端部隔开第一距离(D),该第一距离足以防止在电极结构运行时发生不希望的等离子体放电。在第一实施例(42')中,参考电极具有与第一周边密封件(106)间隔开的端部(112)。参考电极的端部与第一周边密封件分开第二距离(E),该第二距离足以防止由于通道中的等离子体放电而导致第一周边密封件的实质腐蚀或其他分离。在第二实施例(42”)中,参考电极的端部(112')被嵌入第一周边密封件(106')中。

著录项

  • 公开/公告号US5276384A

    专利类型

  • 公开/公告日1994-01-04

    原文格式PDF

  • 申请/专利权人 TEKTRONIX INC.;

    申请/专利号US19920937797

  • 发明设计人 PAUL C. MARTIN;

    申请日1992-08-26

  • 分类号H01J17/49;

  • 国家 US

  • 入库时间 2022-08-22 04:32:26

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