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Optical movement measuring method and apparatus using interference fringes generated by overlapping spots of diffracted lights of different orders of diffraction from a line source
Optical movement measuring method and apparatus using interference fringes generated by overlapping spots of diffracted lights of different orders of diffraction from a line source
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机译:使用由来自线源的不同衍射级的衍射光的重叠光点重叠产生的干涉条纹的光学运动测量方法和装置
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摘要
An optical movement measuring method and apparatus measures a movement of an object. A light from a light source is irradiated on a diffraction grating which is provided on the object so as to generate diffracted lights of different order of diffraction. The diffraction grating has light transmitting portions and light blocking portions which are alternately and periodically arranged. Interference fringes which comprises bright and dark stripes which occur alternately and are generated by overlapping spots of diffracted lights of different order of diffraction are detected, and a movement of the object is measured based on a counted number of stripes of the detected interference fringes.
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