ko - rudotoratsupuuo - tadoren of vacuum container

摘要

(57) Abstract Objective The vacuum container smell in the semiconductor production device and the likeThe te, ko - rudotoratsupu 3 is put truly in the sky, but largeWhen the air enters, the mass water condenses to ko - rudotoratsupu 3It solidifies. It is necessary to discharge this water promptly, butThis device designates that this problem is solved as purpose. Constitution The vacuum container 1 in the semiconductor production device and the like and the vacuumTo provide ko - rudotoratsupu 3 in the intermediate position of pump 2, koThe transmission which provides small-sized reefer 4 for the lower part side of - rudotoratsupu 3To hang hot bar 6, in lower part of the said heat transfer stick 6 guttation valve 8po - to 7 which it has was provided. And bottom of heat transfer stick 6 coneTo make the condition destal c, furthermore providing te - pas section a and b in the container, poIt made easy to lead the water to - to 7.