Enclosure manner null of re - zagasu of re - the oscillation device and re - the oscillation

摘要

PURPOSE:To prevent an optical component from being contaminated with an impurity due to diffusion from a laser gas by injecting fresh gas in which the impurity is removed by a filter separately from laser gas from an injection hole in the opposite direction to the component. CONSTITUTION:Fresh gas is supplied from a laser gas cylinder 11. The cylinder 11 is originally to supply insufficient exhaust of laser gas, and an impurity is removed by filters 9a, 9b from the fresh gas, which is injected from injection holes 1a, 1b to a discharge tube 1. Thus, oil content in the gas is arrived by diffusion to a full reflection mirror 2 or an output coupling mirror 3 to prevent the optical components from being contaminated. Thus, it can prevent the components from being contaminated with the impurity due to the diffusion from the gas. Further, it can also prevent the components from being contaminated with dusts adhered to a wall.