PIEZOELECTRIC ACTUATOR, AND MANIPULATOR, OPTICAL SCANNING DEVICE, PHOTOSENSOR, FLOW RATE CONTROLLER, STAGE DEVICE, FOCAL POINT ADJUSTIMG MECHANISM AND OPTICAL DEVICE USING THE ACTUATOR

摘要

PURPOSE: To increase more the amount of the longitudinal displacement of a piezoelectric actuator by a method wherein an internal stress, which is generated in each strain conversion element, is relaxed. ;CONSTITUTION: Strain conversion elements 11 formed into the form of a truncated rectangular pyramid are respectively bonded on both main surfaces of a multilayer piezoelectric element 1 and cavities 14 are respectively formed between the elements 11 and the main surfaces of the element 1. Each strain conversion element 11 has the same plane form as that of the element 1, has an even plate thickness all over and a flat flat part 13 is formed in the center part of the element 11. A body to be driven, which is driven by a piezoelectric actuator, is bonded to the flat parts 13 of the elements 11.;COPYRIGHT: (C)1994,JPO