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PROCESS OF MANUFACTURE OF LAYERS OF P TYPE CONDUCTANCE IN SAMPLES CD OOXNG OO1 OO- OOXTE OF P TYPE
PROCESS OF MANUFACTURE OF LAYERS OF P TYPE CONDUCTANCE IN SAMPLES CD OOXNG OO1 OO- OOXTE OF P TYPE
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机译:P型CD OOXNG OO1 OO-OOXTE样品中P型导电层的制造过程
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摘要
FIELD: manufacture of photodevices. SUBSTANCE: process consists in treatment of surface of sample of CdxHg1-xTe of p-type in plasma of high-frequency with accelerated ions with energy 1-10 eV and current density 4-8 mА/сm2.. Then layer by layer etching of sample is conducted alternated by check of free carriers on surface. Etching is conducted till layer having electron concentration n ≅ 2·1014 cm-3 for x ≅ 0,22. is obtained. EFFECT: facilitated manufacture, increased quality of layers. 2 cl, 2 dwg, 1 tbl
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机译:领域:光电设备的制造。实质:该过程在于用能量为1-10的加速离子处理高频等离子体中p型Cd x Sub> Hg 1-x Sub> Te样品的表面eV和电流密度4-8mА/сm 2 Sup> ..然后通过检查表面自由载流子,交替进行样品的逐层蚀刻。刻蚀进行到电子浓度为n≤2·10 14 Sup> cm -3 Sup>的层达到x≤0.22。获得。效果:便于制造,提高了层的质量。 2 cl,2 dwg,1汤匙
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