Protective device for a high frequency - generator, high frequency - generator and a method for protecting a high frequency - generator in the case of power to the destruction of the faulty adaptation

摘要

The protection against destruction by defective power matching has a detector circuit (40) for fault matching of the HP generator (10) output to the input requirement of the consumer appliance (28). The detector circuit generates an output signal, indicating a fault matching. To the detector circuit is coupled a control circuit (46) for the rated output power of the HF generator in a fault matching instance. The control circuit acts on the HF generator such that it responds to the detector circuit output signal so that the output power of the HF generator is reduced until the power matching is attained, without reducing the required peak power required for the consumer appliance feed. USE/ADVANTAGE - For plasma generating consumer appliances, can for supply appliance with full peak output and protection despite faulty power matching.