MICROSENSOR STRUCTURE NOT AFFECTED BY MEDIUM AND MANUFACTUREAND USE THEREOF

摘要

PROBLEM TO BE SOLVED: To achieve protection structure and method with improved cost efficiency and reliability by protecting a micro sensor device against a strict medium and withstanding a wide range of medium conditions. SOLUTION: A micro sensor structure 11 which is not affected by a medium for detecting the environmental conditions in a strict medium includes an inorganic protection film 17 for covering a structure part being exposed to the strict medium. The micro sensor structure 11 is provided with a micro sensor package 12, a micro sensor device 16 joined to the micro sensor package 12, a lead frame 13, a connection wire 14 for connecting the micro sensor device 16 to a lead frame 13, and an inorganic protection film 17 which is formed on the entire part or a part of the exposure surface of the structure body.