THERMISTOR FLOW VELOCITY SENSOR AND FLOW RATE SENSOR FOR LIQUID

摘要

PURPOSE: To provide a flow rate sensor for fluids which is superior in thermal responsivity, compact and highly accurate, by installing a heat-generating body and a thermistor and forming the body and thermistor into a plane shape. ;CONSTITUTION: The thermistor flow velocity sensor 72 is arranged in a flow passage of a piping 70 or the like in a manner not to disturb the flow of a fluid. The sensor 72 has a sensor part 73 at a face on the inner wall of a container where the flow of the fluid is detected. The sensor part 73 is connected to a connection terminal 74 set at an outer face of the container via a lead wire 75. The sensor part 73 has a heat-generating body 11 on one face of a flat substrate 10 of alumina or the like, electrodes 12, 17 at both ends, an insulating body 13 formed to cover the upper surface of the heat-generating body 11 and a thermistor 14 on the upper surface of the insulating body 13. The thermistor 14 is equipped with upper and lower electrodes 16, 15 and is of a size not to come outside the heat-generating body 11. Since the sensor part 73 is formed into a plane, the sensor 72 itself is made compact and superior in thermal responsivity, achieving highly accurate measurements.;COPYRIGHT: (C)1996,JPO