首页> 外国专利> High-Saturation Current and Low Leakage Current Fermi-Delay Field Effect Transistor (HIGH SATURATION CURRENT, LOW LEAKAGE CURRENT FERMI THRESHOLD FIELD EFFECT TRANSISTOR)

High-Saturation Current and Low Leakage Current Fermi-Delay Field Effect Transistor (HIGH SATURATION CURRENT, LOW LEAKAGE CURRENT FERMI THRESHOLD FIELD EFFECT TRANSISTOR)

机译:高饱和电流和低漏电流费米延迟场效应晶体管(高饱和电流,低漏电流费米阈值场效应晶体管)

摘要

The high saturation current low leakage Fermi delayed field effect transistor includes a doping concentration of a predetermined minimum of the source and drain facing the channel to maximize the saturation current of the transistor. A source and drain doping gradient region is also provided between the source / drain and the channel, each having a thickness of 300 A or more. By increasing the doping concentration of the channel that yields a fermi potential double the fermi potential from the channel, as long as the zero electrostatic field is still maintained in the channel perpendicular to the substrate, the threshold voltage of the Fermi FET is You can double the rate. By maintaining the predetermined channel depth (preferably about 600 A), the saturation current and the threshold voltage can be independently varied to increase the source / drain doping concentration facing the channel and to increase the excess carrier concentration in the channel . A Fermi-FET with a gate insulator thickness of less than 120 A and a channel length of less than about 1 uses a power source between 0 and 5 volts and has a leakage current of less than 10 picofaram per micron of channel length, A P-channel saturation current of at least 4 amperes and an N-channel saturation current of at least 7 amperes per centimeter of channel side.
机译:高饱和电流低泄漏费米延迟场效应晶体管包括面对沟道的源极和漏极的预定最小值的掺杂浓度,以使晶体管的饱和电流最大化。在源极/漏极与沟道之间还提供了源极和漏极掺杂梯度区域,每个区域的厚度为300 A或更大。通过增加产生费米电势的沟道的掺杂浓度,只要垂直于衬底的沟道中仍保持零静电场,费米FET的阈值电压就可以增加一倍。比率。通过维持预定的沟道深度(优选地为大约600A),可以独立地改变饱和电流和阈值电压,以增加面对沟道的源极/漏极掺杂浓度并增加在沟道中的过量载流子浓度。栅极绝缘体厚度小于120 A,沟道长度小于约1的费米FET使用的电源介于0至5伏之间,每微米沟道长度A P的泄漏电流小于10皮法拉姆。 -沟道饱和电流为每厘米通道侧至少4安培,N沟道饱和电流至少为7安培。

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