MANUFACTURE OF MIM-TYPE NONLINEAR ELEMENT AND LIQUID-CRYSTAL DISPLAY DEVICE USING MIM-TYPE NONLINEAR ELEMENT

摘要

PURPOSE: To provide a manufacturing method of an MIN-type nonlinear element which can enhance nonlinear characteristic of the MIN-type nonlinear element. ;CONSTITUTION: A Ta electrode layer 16 is formed on a transparent substrate 12, the Ta electrode layer 16 is anodized to form a Ta₂O₅ anodized film 18. Then, when the transparent substrate 12 on which the Ta electrode layer 16 and the Ta₂O₅ anodized film 18 have been formed is heat-treated by using a heat treatment furnace. The heat treatment is executed in an N₂ atmosphere, at 450°C and for two hours, the atmosphere is then changed over to a mixed atmosphere of oxygen gas and nitrogen gas at 450°C, the temperature is lowered to 250°C or lower, and the transparent substrate is then taken out to the air from the heat treatment furnace. Then, a Cr electrode layer 20 is formed on the Ta₂O₅ anodized film 18 to form an MIM-type nonlinear element 50.;COPYRIGHT: (C)1996,JPO