GLASS BOARD CARRYING-OUT METHOD, GLASS CARRYING-OUT DEVICE, AND GLASS BOARD FEEDING DEVICE WITH IT

摘要

PROBLEM TO BE SOLVED: To prevent a wasteful action to extract a glass board when there is no glass board by providing a vacuum sensor and a proximity sensor on the adsorption hand of a carrying-out device absorbing and carrying-out the glass board, checking the presence or absence of the glass board with the proximity sensor, then controlling the movement of the absorption hand. ;SOLUTION: The arm section 12 of a robot is lifted, and its absorption hand 9 is located at the horizontal position somewhat below a glass board 2 in a cassette 3 mounted on a frame 11. The absorption hand 9 is traversed into contact with the lower face of the glass board 2, and the glass board 2 is absorbed by the absorption hand 9 via a absorptive action. When the absorption hand 9 is traversed to the position below the glass board 2 to be extracted, the presence or absence of the glass board 2 is detected by a proximity sensor. If the proximity sensor is turned off, it is judged that no glass board 2 exists on this stage, and the absorption hand 9 is controlled to be retreated from the cassette 3.;COPYRIGHT: (C)1997,JPO