Verfahren zur Herstellung von 3-dimensional strukturierten Polymerschichten für die integrierte Optik

摘要

The claimed process is used to fabricate three-dimensionally structured polymer films, for example lenses, which are deposited on the end of optical fibers or laser light sources. The claimed process is based on the use of photopolymerizable dry lacquer as starting material. The dry lacquer is applied to the substrate and exposed to light in a predetermined dosage, distribution and duration in a structural zone precalculated with submicrometer precision using image-processing methods and corresponding to the form of the desired lens. The photopolymerized lenticular structural zones are then extracted from the unexposed dry lacquer. With the claimed process it is possible to place lenses of submicrometer precision on an optical fiber or a laser.