HEAT-TREATING CONDUCTIVE THIN FILM USING A-C MAGNETIC FIELD

摘要

PROBLEM TO BE SOLVED: To heat-treat a conductive thin film uniformly at a good reproducibility and low cost for a short time. ;SOLUTION: An a-c magnetic field 15 perpendicular to the surface of a conductive thin film 1 formed on an insulation structure 17 is applied to the substrate and the film 1 classified in semiconductors such as amorphous Si having specific resistivity of less than 10¹⁰Ωcm at a frequency f≥1Hz and field intensity H≥1V/cm to generated an induced current 16 in the conductive film which selectively inductively heats only the semiconductor even in a laminate of insulators and semiconductor.;COPYRIGHT: (C)1998,JPO