REDUCTION IN MOBILE ION AND METAL CONTAMINATION BY VARYING SEASON TIME AND BIAS RF POWER DURING CHAMBER CLEANING By Changing Season Time And Bias RF Power During Chamber Cleaning

摘要

The present invention provides a method and apparatus for reducing the concentration of flowing ions and metal contamination in a processing chamber by increasing the bias RF power by at least 0.051 W / mm2 and increasing the season time by at least 30 seconds during the chamber seasoning step. The method of performing a season step in a chamber by depositing the deposition material under a combination of a bias RF power density of about 0.095 W / mm 2 and a season time of about 50 to 70 seconds is achieved by using the flow ions and metals in the chamber by about one magnitude. To reduce the concentration of contamination.