首页> 外国专利> A method of forming a semiconductor structure, a method of forming a multi-chip integrated circuit structure, a method of bonding an integrated circuit chip to a workpiece, an integrated electrical structure and a cube structure

A method of forming a semiconductor structure, a method of forming a multi-chip integrated circuit structure, a method of bonding an integrated circuit chip to a workpiece, an integrated electrical structure and a cube structure

机译:形成半导体结构的方法,形成多芯片集成电路结构的方法,将集成电路芯片结合到工件的方法,集成电结构和立方体结构

摘要

A cube package of stacked silicon alumina chips has been disclosed. To package into a cube, metal transfers are added on the surface of the surface stabilization chip so that all surface electrical contacts are drawn to a common chip edge. The metal transfer layer is insulated from the surface of the chip and from adjacent needles in the stack structure by a polymo layer in which the dielectric constant coincides with the low dielectric constant and the stacked chips. An adhesive polymer layer is added to enhance adhesion between the first polymer layer and adjacent chips in the laminate structure, which is deposited at the wafer level and partially cured and fully cured when the needles are stacked to form a cube. do.
机译:已经公开了堆叠的硅氧化铝芯片的立方体封装。为了封装成立方体,在表面稳定芯片的表面上增加了金属转移,以便所有表面电触点都被拉到一个共同的芯片边缘。金属传输层通过多晶层与芯片的表面以及与堆叠结构中的相邻针绝缘,该多晶层的介电常数与低介电常数和所堆叠的芯片一致。添加粘合剂聚合物层以增强第一聚合物层与层压结构中相邻芯片之间的粘合力,该粘合剂层沉积在晶圆层面,并在堆叠针头以形成立方体时部分固化和完全固化。做。

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