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Superconducting field-effect transistor with extremely thin superconducting channel made of oxide superconductor material
Superconducting field-effect transistor with extremely thin superconducting channel made of oxide superconductor material
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机译:具有由氧化物超导体材料制成的极薄超导沟道的超导场效应晶体管
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摘要
A method for patterning an oxide superconductor thin film, comprising a step of forming a SiO2 layer on the oxide superconductor thin film, patterning the SiO2 layer so as to form the same pattern as that of the oxide superconductor thin film which will be patterned, etching the oxide superconductor thin film by using the patterned SiO2 layer as a mask, and removing the SiO2 layer by using a weak HF solution, a buffer solution including HF or a mixture including HF IMAGE
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