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Method for the preparation of nanocrystalline diamond thin films
Method for the preparation of nanocrystalline diamond thin films
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机译:纳米晶金刚石薄膜的制备方法
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摘要
A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.
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