SYNTHESIS OF COMPOUND SEMICONDUCTOR POLYCRYSTAL AND COMPOUND SEMICONDUCTOR POLYCRYSTAL SYNTHESIZED BY THE SYNTHESIS METHOD

摘要

PROBLEM TO BE SOLVED: To make preventable the shift of a peek position of temperature when relatively moving an ampul and a heater, thereby make the feed of a groove V element coincide with the synthetic rate and synthesize a polycrystal having a composition stoichiometric over a wide range of the starting end to the terminal end. ;SOLUTION: The relative movement of an ampul is carried out at a speed in the middle of synthesis lower than that in the initial synthesis in the method for synthesizing a polycrystal comprising vacuum sealing a boat carrying a group III element of a raw material at one end of the ampul and a group V element of the raw material placed in the other end, heating the whole ampul, locally heating the boat to a higher temperature, reacting the group III element with the vapor of the group V element produced from the group V element in the boat and synthesizing the III-V semiconductor polycrystal while slowly relatively moving the high-temperature part.;COPYRIGHT: (C)1999,JPO