The computer readable recording medium for recording the plasma particle analysis method and plasma particle analysis program of the

摘要

PROBLEM TO BE SOLVED: To reduce plasma particle analysis processing time without degrading analysis accuracy. SOLUTION: This plasma particle analysis method obtains the particle density distribution of electrons, ions and neutral particles in plasma and the distribution of potential and electron temperature throughout a region in a plasma state by the use of a fluid model, then obtains the distribution of electric field intensity and the distribution of ionization rates in the plasma from the obtained distributions, extracts an ion sheath region and a sub-sheath region from the entire region in the plasma state by the use of the distribution of the electric field and the distribution of the ionization rates, analyzes the movement of electrons by using the Monte Carlo method in the ion sheath region and the sub-sheath region and obtains reaction constants of electrons with other electrons, ions and neutral particles.