Perpendicular magnetization film, manufacturing method of multilayer film and perpendicular magnetization films for perpendicular magnetization film

摘要

PURPOSE: To provide a vertical magnetizing film which has good oxidation resistance and corrosion resistance, has proper coercive force which can avoid magnetic saturation of a magnetic head and consists of an Fe-based spinel structure thin film containing Co and Ni, and a manufacturing method for acquiring a vertical magnetizing film industrially. ;CONSTITUTION: Fe-base spinel structure thin films containing Co and Ni are formed on a substrate and orientated parallel to the substrate by priority. In this multilayer, vertical magnetizing film, the spacing between layers is 2.082Å or less, the molar ratio of Co to Fe in the thin film is 0.005 to 0.32, the molar ratio of Ni to Co is at least 0.6, and the coercive force of the thin film is smaller than 3000Oe. The multilayer film containing Co and Ni which consists of a magnetite layer which contains or does not contain one kind of Co and Ni formed on the substrate and an oxide layer which contains at least one kind of Co and Ni. Composition, etc., of the multilayer film is the same as the vertical magnetizing film.;COPYRIGHT: (C)1994,JPO&Japio