POWER TRANSMISSION STRUCTURE USING HYDRO-STATIC COUPLING AS STRUCTURE BETWEEN THE FEED TABLE AND BALL SCREW OF A SUPER PRECISION PROCESSING MACHINE

摘要

According to the present invention, in the fastening of the transfer table and the ball screw of the ultra-precision machine, the transfer table 1 mounted on the fixed block 11 is connected to the ball screw nut 6 of the ball screw feed system through the slide 5. In conveying along the guide rails 10-1 and 10-2 fixed to the fixing block 11, the ball screw nut 6 is fixed to prevent the ball screw 7 from rotating together with the ball screw 7. In the block 11, a guide roller 8 through which the ball screw nut 6 is guided is installed, and a cap 3 is provided at the rear end of the slide 2 fixed to the transfer table 1, and this cap is provided. The plate 4 fixed to the slide 5 on the ball screw nut 6 side is inserted between the slide 3 and the plate 4 so that the plate 4 can receive the positive pressure. By constraining the rotational movement of the ball screw nut 6, it is possible to precisely move the front and back of the transfer table 1 back and forth. I can not.