in an optical projection system dünnschichtbetätigtes spiegelarray and methods for its manufacture

摘要

the maximum driving angle and with a mirror can make thin film type optical path control device is started. according to the invention, according to the thin film type optical path adjusting device of m x n matrix of the MOS transistor is on, the surface drainage. the dynamic model of the active agent in the electric system protection to form the protective layer.;in the protective layer, the protective layer and the upper part of the active matrix of etching to prevent etching prevention layer is formed. the etching prevention layer on one side, the other side is in contact with the air gap in between... the etching prevention layer, to form the horizontal and to the membrane and the membrane of the above form of the electrode and the electrode of the above, the form of deformation of the deformation part, and the the ministry of health in the form of the electrode and the deformation of the upper part of the drainage to the vertical to form a non selection of the liquid containing the other device is to prevent the formation of loyalty in the etching.;the upper electrode of the upper part is formed in a mirror. according to the invention, the thin film type optical path according to the light source device can be generalized to improve light efficiency and contrast (contrasts) improve.