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OPTICAL FILM PHYSICAL PROPERTY MEASURING MEDIUM, OPTICAL FILM PHYSICAL PROPERTY MEASURING METHOD AND OPTICAL MEDIUM MANUFACTURING DEVICE
OPTICAL FILM PHYSICAL PROPERTY MEASURING MEDIUM, OPTICAL FILM PHYSICAL PROPERTY MEASURING METHOD AND OPTICAL MEDIUM MANUFACTURING DEVICE
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机译:光学膜物理测量介质,光学膜物理测量方法和光学介质制造装置
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摘要
PROBLEM TO BE SOLVED: To efficiently measure the film physical property of an optical recording medium by using a substrate having double refractivity without stopping a manufacturing line when a polarization analysis technology such as ellipsometry is employed. ;SOLUTION: In the manufacturing mode of an optical disk sample, an optical disk substrate 101 is inserted into a substrate inlet/outlet 102 with front and back sides reversed to that in the case of an optical disk manufacturing mode, and then a substrate carrier mechanism 105 carries this optical disk substrate 101 to a cathode 110 to form a reflecting layer on the optical disk substrate 101. Then, this optical disk substrate 101 is carried to a cathode 106, and an optical disk sample laminated with a thin film to be measured is manufactured.;COPYRIGHT: (C)2000,JPO
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