HEAT TRANSFER MECHANISM UNDER VACUUM, AND VACUUM TREATMENT DEVICE PROVIDED WITH THE HEAT TRANSFER MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a heat transfer mechanism under vacuum, which is capable of sufficiently ensuring the heat transfer between a rotating body to be rotated under vacuum and a fixed part opposite to the rotating body, and a vacuum treatment device provided with the heat transfer mechanism. ;SOLUTION: A heat transfer mechanism transfer the heat between a rotating body 5 and a fixed part 10 under vacuum. A plurality of first concentric cylindrical members 8 around the axis O1 of rotation of the rotating body 5 are protruded from the rotating body 5. A plurality of second concentric cylindrical members 9 around the axis O1 of rotation of the rotating body 5 are protruded from the fixed part 10 so as to be inserted in annular gaps between the first concentric cylindrical members 8. The first concentric cylindrical members 8 and the second concentric cylindrical members 9 are combined with and opposite to each other.;COPYRIGHT: (C)2000,JPO