TWIN-CRYSTAL-GRAIN-BOUNDARY-JUNCTION SUPERCONDUCTING FIELD EFFECT DEVICE AND MANUFACTURING METHOD THEREOF

摘要

The present invention is a grain boundary junction pair superconducting field effect devices, and relates to a method of manufacturing the same, in particular, PrBa ₂ Cu ₃ O7- _x composition ratio of the superconducting thin film, YBa ₂ Cu constituting the source and drain, the channel boundary ₃ O ₇ - A superconducting thin film of _x composition, an amorphous insulating thin film gate of SrTiO ₃ composition, and an Au electrode pad are provided on a single crystal grain boundary junction superconducting field effect element having a structure sequentially formed on a single crystal substrate of SrTiO ₃ composition, and a manufacturing method thereof.