Method for specifying accurately the topography of a near planar surface involves scanning a surface with a scanning beam while detecting the angle of a measuring beam reflected off the surface

摘要

Scanning occurs at first point and at second point laterally displaced at a preset distance(s) in a scanning direction (x). The course of the angle along with the surface structure is reconstructed from the angle difference in the measurements at the first point and at the second point. This is achieved by displacing measuring beam (4, 4') at a preset distance, to measure the angle at both points.