首页>
外国专利>
Measuring system used for micro-characterization of the near-surface region of the solid samples has an integral electron filter between the sample and detector
Measuring system used for micro-characterization of the near-surface region of the solid samples has an integral electron filter between the sample and detector
展开▼
机译:用于对固体样品的近表面区域进行微表征的测量系统在样品和检测器之间具有集成的电子滤波器
展开▼
页面导航
摘要
著录项
相似文献
摘要
An integral electron filter (4) is arranged between the solid sample (1) and the detector (3) in the strip region. A bias voltage negative to the solid sample lying below the beam potential of the electron beam (2) is applied to the electron filter. Measuring system comprises an electron beam probe for irradiating a solid sample, a sample support, a local-sensitive detector for detecting electrons scattered back from the sample, and an electronic evaluator. An integral electron filter (4) is arranged between the solid sample (1) and the detector (3) in the strip region. A bias voltage negative to the solid sample lying below the beam potential of the electron beam (2) is applied to the electron filter.
展开▼