首页>
外国专利>
device for the measurement of kraftkomponenten in monokristallinem material, method for manufacturing such a device and its application
device for the measurement of kraftkomponenten in monokristallinem material, method for manufacturing such a device and its application
展开▼
机译:千层碱材料中牛皮纸成分的测定装置,该装置的制造方法及其应用
展开▼
页面导航
摘要
著录项
相似文献
摘要
A device for measuring force components, in single crystal material, consisting of at least one cantilever beam (1, 2, 3, 4) inclined to the plane normal, with adherent mass of inertia is described. It is particularly characterized in that the angle to the plane normal of the cantilever beam is achieved through etching of the single crystal material, and is defined by the inclination of one of the crystal planes that constitute the beam and that normally, the bending of the cantilever beam inclined to the plane normal principally occurs towards the beam. A method of manufacturing such a device is also described.
展开▼