laminated print head for the tintenstrahlaufzeichnen, manufacturing process and with the recording head never touches equipped printer

摘要

A laminated ink-jet recording head is provided that has a strong joint between the diaphragm and the piezoelectric vibrating element and which can be driven on low voltage. The recording head is of such a design that a lower electrode is provided on the diaphragm in at lest a region that corresponds to said pressure generating chamber, the lower electrode being overlaid with the piezoelectric vibrating element formed by a hydrothermal method, said piezoelectric vibrating element in turn being overlaid with an upper electrodes and having a film thickness of not less than 1 mu m but not more than 10 mu m. The invention further provides a process for producing this recording head, as well as an apparatus such as a printer that is equipped with this recording head. IMAGE